| 发明名称 |
VIBRATOR AND PRODUCTION METHOD THEREOF, AND VIBRATION WAVE DRIVING DEVICE |
| 摘要 |
Provided is a vibrator including a substrate; a piezoelectric element including a piezoelectric layer and an electrode layer, the piezoelectric element being fixed to the substrate; and a ceramics layer disposed between the substrate and the piezoelectric element, the ceramics layer having a thickness of more than 0.5 times and less than 1 time a thickness of the piezoelectric layer. |
| 申请公布号 |
US2014159543(A1) |
申请公布日期 |
2014.06.12 |
| 申请号 |
US201314080113 |
申请日期 |
2013.11.14 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Maruyama Yutaka |
| 分类号 |
H01L41/09;H01L41/25 |
主分类号 |
H01L41/09 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A vibrator, comprising:
a substrate; a piezoelectric element including a piezoelectric layer and an electrode layer, the piezoelectric element being fixed to the substrate; and a ceramics layer disposed between the substrate and the piezoelectric element, the ceramics layer having a thickness of more than 0.5 times and less than 1 time a thickness of the piezoelectric layer.
|
| 地址 |
Tokyo JP |
