Miniaturised Sensor Comprising A Heating Element, And Associated Production Method

摘要

The invention relates to a miniaturised sensor having a heating element, and to an associated production method. The sensor includes a substrate, a cavity and a heat-insulating structure suspended above the cavity by areas connecting to the substrate. The heat-insulating structure includes at least two bridges extending above the cavity, the heating element being supported by said bridges, extending transversely thereto.

主权项

1. A miniaturized sensor having a heater element and comprising a substrate, a cavity, and a thermally insulating structure suspended over the cavity by connection zones connecting the insulating structure with the substrate, wherein the thermally insulating structure comprises at least two bridges extending over the cavity between its two connection zones with the substrate, the heater element being supported by the bridges by extending transversely relative to the bridges.