反射型光罩基板及其制造方法、反射型光罩、以及半导体装置之制造方法,申请号TW096101666-传众专利搜索

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发明名称	反射型光罩基板及其制造方法、反射型光罩、以及半导体装置之制造方法
摘要
申请公布号	TWI441238	申请公布日期	2014.06.11
申请号	TW096101666	申请日期	2007.01.17
申请人	凸版印刷股份有限公司日本	发明人	松尾正;金山浩一郎;田村信平
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人	桂齐恒台北市中山区长安东路2段112号9楼;阎启泰台北市中山区长安东路2段112号9楼
主权项
地址	日本

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