发明名称
摘要 <p>A transfer device 5 transfers a fine transfer pattern M1 formed on a mold M to a molding target W. The transfer device includes: a base member 47 including a press body 31; a moving member 49 including a molding target placing body 33 that sandwiches and presses the mold M and the molding target W in cooperation with the press body 31, and is provided on the base member 47 so that the molding target placing body 33 can move; and a moving body supporting body 51 that includes a guide portion 71, and is engaged with and provided integrally on the base member 47 only in a region of the base member 47 elastically deformed very slightly by reaction force when the press is performed, the region being a region where a flexure angle becomes substantially "0".</p>
申请公布号 JP5520642(B2) 申请公布日期 2014.06.11
申请号 JP20100057221 申请日期 2010.03.15
申请人 发明人
分类号 B29C59/02;B29C33/30;H01L21/027 主分类号 B29C59/02
代理机构 代理人
主权项
地址