控制半导体装置制造之方法,申请号TW100149010-传众专利搜索

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发明名称	控制半导体装置制造之方法
摘要
申请公布号	TWI441000	申请公布日期	2014.06.11
申请号	TW100149010	申请日期	2009.01.06
申请人	美特拉斯有限公司英国	发明人	克玛兹　艾德恩
分类号	G05B23/02;G06Q90/00;H01L21/66	主分类号	G05B23/02
代理机构		代理人	陈长文台北市松山区敦化北路201号7楼
主权项
地址	英国

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