发明名称 APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC COMPONENT
摘要 In a method of manufacturing an electronic component according to the present invention, a stage is moved in a +X direction and a substrate is cut by a rotary blade while the rotary blade is rotated in one direction in which an outer peripheral portion of the rotary blade proceeds from a surface (upper surface) of the substrate, which is an uppermost layer, toward an inside of the substrate. Continuously, a two layer structure resin sealing member including the substrate and a sealing resin is cut by moving the stage in a -X direction and cutting the sealing resin with the rotary blade while the outer peripheral portion of the rotary blade proceeds from a surface (lower surface) of the sealing resin, which is a lowermost layer, toward an inside of the sealing resin. Accordingly, chipping and burs which may be generated when the resin sealing member is collectively cut using the rotary blade can be restrained.
申请公布号 KR20140071223(A) 申请公布日期 2014.06.11
申请号 KR20130114383 申请日期 2013.09.26
申请人 TOWA CORPORATION 发明人 NAKAGAWARA HIDEJI;AMAKAWA TSUYOSHI
分类号 H01L21/78 主分类号 H01L21/78
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