| 摘要 |
PROBLEM TO BE SOLVED: To suppress degradation of measurement accuracy even when an objective body moves. SOLUTION: A projector is repeatedly transited under a condition of projecting first to third patterns different each other onto an object, an imaging device forms respectively images of the object onto which the first to third patterns are projected, and a three-dimensional shape measuring device calculates for every pixel a waveform phase expressing temporal variation of a luminance value of each pixel in each image. In images imaged by different imaging devices, pixels on an image plane where an identical point of the object on a three-dimensional space is imaged are correlated based on the luminance values and the phases of the pixels, and a three-dimensional shape is measured based on coordinates of images on the corresponding points. COPYRIGHT: (C)2011,JPO&INPIT |
