| 摘要 |
Each of the suction surfaces (22) of work chucks (21) has: partitioning walls (81a-81d, 82a-82d, 83a-83d), which are formed so as to partition adjacent suction regions (80a-80g), and which can abut on the rear surface of a substrate (W); and a plurality of protruding sections (85), which can abut on the rear surface of the substrate (W) in the suction regions (80a-80g), respectively. The suction surfaces (22) of the work chucks (21) of a plurality of exposure apparatus main bodies (2-5) have substantially the same outer dimension, and the partitioning walls (81a-81d, 82a-82d, 83a-83d) of the work chucks (21) are formed at positions that differ by each of the exposure apparatus main bodies (2-5). |
