发明名称 |
PRODUCTION OF POLYCRYSTALLINE SILICON BY THE THERMAL DECOMPOSITION OF SILANE IN A FLUIDIZED BED REACTOR |
摘要 |
<p>Processes for producing polycrystalline silicon by thermal decomposition of silane are disclosed. The processes generally involve thermal decomposition of silane in a fluidized bed reactor operated at reaction conditions that result in a high rate of productivity relative to conventional production processes.</p> |
申请公布号 |
KR20140071397(A) |
申请公布日期 |
2014.06.11 |
申请号 |
KR20147008427 |
申请日期 |
2012.09.27 |
申请人 |
MEMC ELECTRONIC MATERIALS, INC. |
发明人 |
BHUSARAPU SATISH;GUPTA PUNEET;HUANG YUE |
分类号 |
C01B33/03;B01J8/18;C01B33/107;C30B28/14;F23C10/18 |
主分类号 |
C01B33/03 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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