图案形成方法,申请号TW101114698-传众专利搜索

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发明名称	图案形成方法
摘要
申请公布号	TWI440976	申请公布日期	2014.06.11
申请号	TW101114698	申请日期	2012.04.25
申请人	信越化学工业股份有限公司日本	发明人	小林知洋;旱田山润;永田岳志
分类号	G03F7/038;G03F7/32;H01L21/027	主分类号	G03F7/038
代理机构		代理人	周良谋新竹市东大路1段118号10楼;周良吉新竹市东大路1段118号10楼
主权项
地址	日本

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