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发明名称
磊晶基板的制造方法
摘要
申请公布号
TWI441241
申请公布日期
2014.06.11
申请号
TW099122968
申请日期
2010.07.13
申请人
国立中兴大学 台中市南区国光路250号
发明人
武东星;洪瑞华
分类号
H01L21/205;H01L21/306
主分类号
H01L21/205
代理机构
代理人
高玉骏 台北市松山区南京东路3段248号7楼;杨祺雄 台北市松山区南京东路3段248号7楼
主权项
地址
台中市南区国光路250号
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