发明名称 |
INSPECTION OR OBSERVATION DEVICE AND SPECIMEN INSPECTION OR OBSERVATION METHOD |
摘要 |
<p>Provided is an inspection apparatus or observation apparatus enabling appropriate inspection or observation of a sample in an easy-to-use manner, using a charged-particle technique and an optical technique. Specifically, provided is an inspection or observation apparatus including: a first casing forming at least part of a first space constituting at least part of a region through which a primary charged-particle beam emitted from a charged-particle irradiation section reaches a sample, the first space capable of being maintained in a vacuum state; a second casing provided on the first casing to form at least part of a second space capable of storing the sample therein; a partition wall section for partitioning the first space and the second space from each other, the partition wall section disposed so as to be coaxial with the charged-particle irradiation section when the sample is irradiated with the primary charged-particle beam from the charged-particle irradiation section; and an optical observation section for casting light onto the sample and detecting light from the sample from the same direction as the charged-particle irradiation section.</p> |
申请公布号 |
KR20140071407(A) |
申请公布日期 |
2014.06.11 |
申请号 |
KR20147008793 |
申请日期 |
2012.09.03 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
OMINAMI YUSUKE;KONOMI MAMI;ITO SUKEHIRO;OHTAKI TOMOHISA;KAWANISHI SHINSUKE |
分类号 |
H01J37/18;H01J37/16;H01J37/20 |
主分类号 |
H01J37/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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