| 摘要 |
PURPOSE: A deposition apparatus is provided to reduce the danger of malfunction and damage of an evaporation source by preventing the climbing of aluminum and the inflow of aluminum vapor. CONSTITUTION: An evaporation source unit(26) is included within a vacuum chamber. The evaporation source unit comprises a crucible(1), a nozzle(2), a heater chamber(10), and a fixture(7). The crucible accepts evaporation material(5). The nozzle is installed at opening of the crucible. The heater chamber surrounds the crucible. The heater chamber accepts a heater(3). The nozzle comprises a secondary heater. The nozzle is heated over the melting point of an evaporation source. |
