| 发明名称 |
Position detecting method for performing position alignment of transfer point of transfer arm |
| 摘要 |
A position alignment of a transfer point of a transfer arm is performed by using a position detecting method. The method includes: detecting electrostatic capacitances in relation with a reference object for position alignment by a plurality of electrostatic capacitance detecting electrodes provided on a surface of the substrate body; communicating with each electrostatic capacitance detecting electrode and controlling a detection of each electrostatic capacitance detecting electrode; and calculating coordinates (x, y) of the reference object with respect to the substrate body based on a preset relationship between electrostatic capacitance values of multiple electrostatic capacitance detecting electrodes and a position of the reference object with respect to the substrate body. |
| 申请公布号 |
US8749257(B2) |
申请公布日期 |
2014.06.10 |
| 申请号 |
US201213405766 |
申请日期 |
2012.02.27 |
| 申请人 |
Tokyo Electron Limited |
发明人 |
Matsumoto Toshiyuki;Minami Tomohide;Douki Yuichi;Mahara Koji |
| 分类号 |
G01R31/00;G01R31/312 |
主分类号 |
G01R31/00 |
| 代理机构 |
|
代理人 |
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| 主权项 |
1. A position detecting method for performing position alignment of a transfer point of a transfer arm which holds and transfers a substrate body, the method comprising:
detecting electrostatic capacitances in relation with a reference object for position alignment by a plurality of electrostatic capacitance detecting electrodes provided on a surface of the substrate body; communicating with each electrostatic capacitance detecting electrode and controlling a detection of each electrostatic capacitance detecting electrode; and calculating coordinates (x, y) of the reference object with respect to the substrate body based on a preset relationship between electrostatic capacitance values of multiple electrostatic capacitance detecting electrodes and a position of the reference object with respect to the substrate body.
|
| 地址 |
Tokyo JP |
