Transparent conducting oxides and production thereof

摘要

Transparent conducting oxides and production thereof are disclosed. An exemplary method of producing a transparent conducting oxide (TCO) material may comprise: providing a TCO target doped with either a high-permittivity oxide or a low-permittivity oxide in a process chamber. The method may also comprise depositing a metal oxide on the target in the process chamber to form a thin film having enhanced optical properties without substantially decreasing electrical quality.

主权项

1. A method of producing a transparent conducting oxide (TCO) material, comprising:
positioning a substrate within a process chamber; providing a TCO target in the process chamber, wherein the TCO target comprises a host oxide and an amount of an added oxide; and from the target, depositing a TCO metal oxide formed from the host and added oxides to form a thin film on the substrate, wherein optical transmission of the thin film formed with the TCO metal oxide is greater than optical transmission of a second thin film formed from a target comprising the host oxide and free of the amount of the added oxide, wherein the thin film formed with the TCO metal oxide has an electrical quality at least as great as the electrical quality of the second thin film, and wherein the depositing comprises sputter depositing the TCO metal oxide in a mixture of less than about 0.8 percent oxygen and argon.