| 摘要 |
The invention relates to measuring equipment and is intended for contact-less measurement of the value of displacement of objects with nanometric resolution. A bi-axial laser heterodyne device for measurement of displacement of an object comprises an optically related laser, acousto-optical modulator with possibility of formation at output of the ray of laser heterodyne, and laser beam sounding the object. The measuring device includes a beam splitter- mixer of radiation of laser heterodyne and laser radiation dissipated by the object that moves, objective, in focal plane of which there is a photodetector that is electrically connected to the input of the device for information processing, and generation of excitation of acousto-optical modulator that is electrically connected to the acousto-optical modulator. For determination the value of displacement of the object a two-channel device for information processing is used, to the second output of this one excitation generator of acousto-optical modulator is electrically connected. The technical result of the invention is in increase of accuracy of measurement of dynamical characteristics as continuous objects and ensembles of particles as well, with those in muddy media included, behind transparent for laser radiation illuminators, due to compensation of effect of instability of frequency of generator. |
