Method for manufacturing piezoelectric element, piezoelectric element, liquid ejecting head, and liquid ejecting apparatus

摘要

A piezoelectric element is manufactured in a method including forming an adhesion layer of zirconium above a zirconium oxide insulating film, forming a first electrode above the adhesion layer, forming a piezoelectric layer of a complex oxide containing bismuth above the first electrode, and forming a second electrode above the piezoelectric layer.

主权项

1. A piezoelectric element comprising:
an insulating film made of zirconium oxide; an adhesion layer containing zirconium, disposed above the insulating film; a first electrode disposed directly on the adhesion layer; a piezoelectric layer made of a complex oxide containing bismuth, disposed above the first electrode; and a second electrode disposed above the piezoelectric layer, wherein the first electrode includes zirconium diffused from the adhesion layer and the adhesion layer includes partially oxidized bismuth diffused from the piezoelectric layer.