Acceleration sensor having a damping device

摘要

A micromechanical acceleration sensor is described which includes a substrate and a seismic mass which is movably situated with respect to the substrate in a detection direction. The micromechanical sensor includes at least one damping device for damping motions of the seismic mass perpendicular to the detection direction.

主权项

1. A micromechanical sensor, comprising:
a substrate; a seismic mass movably situated with respect to the substrate in a detection direction; and at least one damping device to damp motions of the seismic mass perpendicular to the detection direction; wherein the at least one damping device comprises web-shaped damping structures having slotted holes positioned on the seismic mass and bar-shaped damping structures connected to the substrate and situated within the slotted holes.