CATALYST AND FORMULATIONS COMPRISING SAME FOR ALKOXYSILANES HYDROLYSIS REACTION IN SEMICONDUCTOR PROCESS

摘要

The present invention relates to a catalyst for alkoxysilanes hydrolysis reaction in a semiconductor process and a formulation comprising the same. The catalyst for alkoxysilanes hydrolysis reaction in a semiconductor process and the formulation comprising the same according to one embodiment of the present invention are deposited on a substrate by a second formulation and combination. The distribution or transfer of a reaction formulation is performed by dipping or centrifugal spin-coating.