POWER SWITCHING SYSTEM FOR ESC WITH ARRAY OF THERMAL CONTROL ELEMENTS

摘要

A semiconductor substrate support part for supporting a semiconductor substrate in a plasma processing chamber includes a heater array containing heat control elements capable of operation in order to perform tuning on space temperature profiles on the semiconductor substrate. The heat control elements define heater sections respectively power-supplied by at least two electric power supply lines and at least two electric power supply lines. Each electric power supply line is connected to at least two among heater sections. Each electric power return line is connected to at least two among heater sections. An electric power distribution circuit is engaged with a base plate of the substrate support part and is connected to each of the electric power supply line and the electric power return line of the heater array. A switching device is connected to the electric power distribution circuit in order to independently provide time-averaged electric power to each of the heater sections by time-division multiplexing of multiple switches.