| 摘要 |
A surface acoustic wave element and equipment for measuring the physical characteristics of a liquid material without causing short-circuit of an input electrode and an output electrode even if the element or the equipment is immersed into the liquid material of measurement object. The first surface acoustic wave element has input electrodes surrounded by a sealing member having a circumferential wall formed on a piezoelectric substrate, and a top plate covering the circumferential wall, and a sealing reinforcement is formed on the piezoelectric substrate in parallel with a wall to face a material, which is to be measured and loaded on the piezoelectric substrate. The output electrodes are surrounded by a sealing member having a circumferential wall formed of photosensitive resin on the piezoelectric substrate, and a top plate covering the circumferential wall, and a sealing reinforcement is formed on the piezoelectric substrate in parallel with a wall to face the material, which is to be measured and loaded on the piezoelectric substrate. |
