发明名称 Semiconductor constructions
摘要 Some embodiments include semiconductor processing methods in which a copper barrier is formed to be laterally offset from a copper component, and in which nickel is formed to extend across both the barrier and the component. The barrier may extend around an entire lateral periphery of the component, and may be spaced from the component by an intervening ring of electrically insulative material. The copper component may be a bond pad or an interconnect between two levels of metal layers. Some embodiments include semiconductor constructions in which nickel extends across a copper component, a copper barrier is laterally offset from the copper component, and an insulative material is between the copper barrier and the copper component.
申请公布号 US8749066(B2) 申请公布日期 2014.06.10
申请号 US201213615170 申请日期 2012.09.13
申请人 Micron Technology, Inc. 发明人 Zhang Tianhong;Ditali Akram
分类号 H01L29/40;H01L23/52;H01L23/48 主分类号 H01L29/40
代理机构 代理人
主权项 1. A semiconductor construction, comprising: a semiconductor substrate having a first metal-containing layer over a semiconductor base, a first electrically insulative material over the first metal-containing layer, an electrically conductive interconnect extending through the first electrically insulative material to the first metal-containing layer, and a second metal-containing layer over the first electrically insulative material and proximate the electrically conductive interconnect; a first electrically conductive structure directly over and electrically coupled to the electrically conductive interconnect, and electrically coupled to the second metal-containing layer; the first electrically conductive structure being directly against two opposing lateral sides of the second metal-containing layer along a cross-section; a second electrically conductive structure laterally offset from the first electrically conductive structure by an intervening electrically insulative region, the second electrically conductive structure being over and in direct contact with the first electrically insulative material; and a nickel-containing material over and in direct contact with the first electrically conductive structure, second electrically-conductive structure, and the intervening electrically insulative region.
地址 Boise ID US