Apparatus and method for treating substrate, and injection head used in the Apparatus

摘要

Provided are an injection head, and a substrate treatment apparatus and method using the same. The substrate treatment apparatus includes a rotatable spin head supporting a substrate, an injection head installed on the spin head to supply a fluid to a bottom surface of the substrate supported on the spin head, and a fluid supply unit supplying the fluid to the injection head. The injection head includes a body disposed below a center region of the substrate supported on the spin head to receive the fluid from the fluid supply unit and a injection member extending from the body to an edge region of the substrate supported on the spin head to inject the fluid supplied from the body to the bottom surface of the substrate, the injection member having first injection openings injecting the fluid to the edge region of the substrate and second injection openings injecting the fluid to a middle region disposed between the center region and the edge region, and a flow path through which the fluid is supplied to the first injection openings and then to the second injection openings.

主权项

1. A substrate treatment apparatus, comprising:
a rotatable spin head supporting a substrate; an injection head installed on the spin head to supply a fluid to a bottom surface of the substrate supported on the spin head; and a fluid supply unit supplying the fluid to the injection head; wherein the injection head comprises:
a body disposed above a center portion of the rotatable spin head and supported on the rotatable spin head to receive the fluid from the fluid supply unit; andan injection member extending from the body to an edge region of the substrate supported on the spin head to inject the fluid supplied from the body to the bottom surface of the substrate;wherein the injection member comprises first injection openings and second injection openings, the first injection openings configured for injecting the fluid to the edge region of the substrate and the second injection openings configured for injecting the fluid to a middle region of the substrate, the middle region disposed between the center region and the edge region; andfirst and second flow paths disposed inside the injection member, the first flow path for flowing fluid from a first end of the injection member connected to the body toward a second end of the injection member, and the second flow path extending from the first flow path for flowing fluid from the second end of the injection member toward the first end of the injection member, the second injection openings being disposed along the second flow path.