System and method for probe-based high precision spatial orientation control and assembly of parts for microassembly using computer vision

摘要

A microassembly method and system utilizing multiple probes. Multiple manipulation actuators can be utilized for maintaining/holding one or more probes and an assembly substrate. Multiple microscope cameras can be configured to provide three distinct workspace configurations. At the center of each manipulation actuator is a die stage, which supports the assembly substrate upon which parts are assembled. A glue dispenser can also provide glue to a part prior to placement.

主权项

1. A system for rnicroassembly of microelectromechanical systems comprising:
a die stage and a plurality of manipulation actuators for holding a plurality of probes, wherein said die stage is located between at least two probes among said plurality of probes; a top camera directly above said die stage, and a front camera and a plurality of orientation cameras a plurality of microscope cameras positioned around said die stage, to create three workspaces, wherein a first and second workspace are created utilizing said top camera and said front camera and a third workspace is created utilizing said top camera and said plurality of orientation cameras; and an assembly substrate located on said die stage.