| 摘要 |
To realize thin film deposition of a large area, disclosed are an electrode separation elastic surface wave large area ink ejecting device and a large area thin film system including the same. According to an embodiment of the present invention, the electrode separation elastic surface wave large area ink ejecting device, which is to eject the ionized ink toward a substrate to form a thin film at the same time applying an elastic surface wave to the ink to be ionized, comprises a housing which is arranged to receive ambient gas in the lower part to flow inside thereof and ejects, to the upper part, the ionized ink by the elastic surface wave to be supplied to the substrate; an ink storage part which penetrates the lower end of the housing and receives the ink to be contained; an electrode separation elastic surface wave generation substrate including an insulation coated first substrate plate which penetrates the side surface of the ink storage part to be dipped in the contained ink and generates the elastic surface wave and a second substrate plate which is connected to the first substrate plate and is fixed in a state of not being in contact with the contained ink to receive a voltage from the outside; and a fixing block which is connected to the side surface of the ink storage part to fix the electrode separation elastic surface wave generation substrate. |
