发明名称 APPARATUS AND METHOD FOR CENTERING SEMICONDUCTOR DEVICE
摘要 An apparatus and a method for aligning a semiconductor device are disclosed. The apparatus comprises: a base plate performing posture conversion between a horizontal posture and a tilted posture; and a movable plate installed to slide on an upper surface of the base plate. The movable plate forms a plurality of device accommodation holes and may move in a side direction by a side direction moving part. When such aligning apparatus is in a tilted posture, the apparatus accommodates the semiconductor device, aligns a first side of the semiconductor device, and makes the side direction moving part move the movable plate in a side direction, thereby aligning a second side of the semiconductor device.
申请公布号 KR101404979(B1) 申请公布日期 2014.06.10
申请号 KR20120080388 申请日期 2012.07.24
申请人 发明人
分类号 H01L21/68 主分类号 H01L21/68
代理机构 代理人
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