发明名称 Clustering of multi-modal data
摘要 Information from multiple detectors acquiring different types of information is combined to determine one or more properties of a sample more efficiently than the properties could be determined using a single type of information from a single type of detector. In some embodiments, information is collected simultaneously from the different detectors which can greatly reduce data acquisition time. In some embodiments, information from different points on the sample are grouped based on information from one type of detector and information from the second type of detector related to these points is combined, for example, to create a single spectrum from a second detector of a region of common composition as determined by the first detector. In some embodiments, the data collection is adaptive, that is, the data is analyzed during collection to determine whether sufficient data has been collected to determine a desired property with the desired confidence.
申请公布号 US8748816(B2) 申请公布日期 2014.06.10
申请号 US201213546863 申请日期 2012.07.11
申请人 FEI Company 发明人 Kooijman Cornelis Sander;Stoks Sander Richard Marie
分类号 H01J37/28;H01J37/244 主分类号 H01J37/28
代理机构 代理人
主权项 1. A method of determining properties of a sample, comprising: detecting using a first detector emissions of a first type from the sample in response to a beam scanned over an area of the sample; detecting using a second detector emissions of a second type from the sample in response to the beam scanned over the area of the sample, the second detector measuring spectral information; using emissions of the first type, dividing the scanned area of the sample into multiple regions, each region having a common characteristic; characterized by: combining emissions of the second type from multiple points at different position along the scan in at least one of the regions determined using emissions of the first type to have a common characteristic to produce a combined spectrum of the material in the region.
地址 Hillsboro OR US