Method of forming a permanently supported lamina

摘要

A method is described for forming a permanently supported thin lamina using decomposable adhesives between a lamina and a temporary support element. The temporary support element may be bonded to a first surface of the lamina. A permanent support element may be applied to a second surface of the lamina, and the temporary support element debonded from the lamina by decomposing the adhesive.

主权项

1. A method for forming a permanently supported thin lamina, the method comprising the steps of:
a) obtaining a donor body comprising a first surface; b) implanting ions into the first surface of the donor body to define a cleave plane; c) exfoliating a lamina from the donor body at the cleave plane, wherein the first surface of the donor body is a first surface of the lamina, wherein the step of exfoliating the lamina forms a second surface on the lamina opposite the first surface of the lamina, and wherein the lamina has a thickness between the first surface and the second surface of less than 25 microns; d) bonding a temporary support element to either the first surface or the second surface of the lamina, wherein the bonding comprises applying a decomposable adhesive between the lamina and the temporary support element; e) applying a permanent support element to the lamina, to the opposite surface on which the temporary support element is bonded; and f) debonding the lamina from the temporary support element, wherein the debonding comprises decomposing the adhesive.