| 摘要 |
The purpose of the present invention is to prevent zero point shift. A capacitance type pressure sensor comprises: a diaphragm (21); a sensor support (20) which fixes a peripheral part of the diaphragm (21) and forms a standard vacuum chamber (28) with the diaphragm (21); a cover plate (1) which is attached to the peripheral part of the diaphragm (21) and forms a pressure introduction room (27) with the diaphragm (21); fixation electrodes (23, 24) which are formed in a surface of the sensor support (20) of the standard vacuum chamber; and driving electrodes (25, 26) which are formed on a surface of the diaphragm (21) of the standard vacuum chamber. The cover plate (1) has a pressure introduction hole (10) inducing an object medium into the pressure introduction room (27). When the diameter of the diaphragm (21) is designed as 100%, the pressure introduction hole (10) is arranged in order to be located in a range of 50.0-70.0% along the surface direction of the diaphragm (21) from the center of the diaphragm (21). |
