| 摘要 |
PROBLEM TO BE SOLVED: To provide an OBIRCH inspection method and an OBIRCH device capable of detecting a point where a defect occurs with higher sensitivity than the conventional method.SOLUTION: At first, an inspected object 30 is mounted on the sample stage 11 of an OBIRCH device. A reflective plate 35 is arranged on the first side of the inspected object 30. Subsequently, a probe pin 12a is brought into contact with the inspected object 30. Thereafter, the second side of the inspected object 30 is irradiated with laser light, while applying a voltage via the probe pin 12a, and a current flowing through the probe pin 12a is detected. |
