发明名称 |
METHOD FOR PRODUCING NANOSTRUCTURE, NANOSTRUCTURE, SENSOR, AND SOLAR CELL |
摘要 |
<p>PROBLEM TO BE SOLVED: To deposit a nanostructure of amorphous carbon without restriction of material quality of a substrate on which the nanostructure is grown, and at a low cost.SOLUTION: A method for producing a nanostructure includes: a step to deposit a carbon nanowall layer 230 by growing the carbon nanowall 220 which is a monolayer body or a multilayer body of a graphene sheet such that the carbon nanowall 220 extends to a direction vertical to a surface of a substrate 210 (CNW layer deposition step S110); and a step to heat the carbon nanowall layer 230 with laser irradiation to a temperature higher than the sublimation temperature of the carbon nanowall 220 in an atmosphere to which the carbon nanowall layer 230 is exposed (irradiation step S120).</p> |
申请公布号 |
JP2014105129(A) |
申请公布日期 |
2014.06.09 |
申请号 |
JP20120259516 |
申请日期 |
2012.11.28 |
申请人 |
IHI CORP |
发明人 |
KAWAGUCHI NORIHITO;YOSHIMURA AKIHIKO |
分类号 |
C01B31/02;B82Y30/00;B82Y40/00;H01L51/42 |
主分类号 |
C01B31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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