| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical deflector capable of detecting a deflection angle of a mirror part with high accuracy even when the frequency of oscillation of the mirror part is a non-resonant frequency.SOLUTION: An optical deflector 1 includes: a first support part 4 for supporting a mirror part 2; a second support part 6 for supporting the first support part 4 via second piezoelectric actuators 51 and 52. The second piezoelectric actuators 51 and 52 include second piezoelectric cantilevers 51A to 51D and 52A to 52D for supporting a piezoelectric body L2. The even-numbered second piezoelectric cantilevers 51B, 51D, 52B and 52D support a piezoelectric body L21 for detection. When the mirror part 2 is oscillated, a first voltage signal Vx1 is applied to the odd-numbered second piezoelectric cantilevers 51A, 51C, 52A and 52C, and to the even-numbered second piezoelectric cantilevers 51B, 51D, 52B and 52D, a second voltage signal Vx2 in a phase opposite to that of the first voltage signal Vx1 is applied. |
