| 摘要 |
PROBLEM TO BE SOLVED: To prevent the peeling of an insulating coating film in a laminate structure constituting an actuator without causing any failure in the function of the actuator in an MEMS(Micro Electro Mechanical System) piezoelectric device.SOLUTION: An actuator part 26 and a non-actuator part 27 of an optical deflector 1 are constituted as first and second portions of a laminate structure 40 having a substrate layer 41, an insulating layer 42, a lower adhesion improved layer 43; a lower electrode layer 44; a piezoelectric film layer 45; an upper electrode layer 46; and an upper adhesion improved layer 47 in order from the bottom. The laminate structure 40 includes: a splitting groove 37 dug down from the upper side to the lower surface of the upper electrode layer 46 at a boundary between the first portion and the second portion; an inter-layer insulating layer 31 coating the upper adhesion improved layer 47 and the splitting groove 37 from the upper surface side; and a plurality of wiring layers 30a to 30d continuously extended in the first and second portions across the boundary on the upper surface of the inter-layer insulating layer 31, one of which is connected to the upper electrode layer 46 in the first portion. |
