ULTRASONIC TRANSDUCER AND METHOD OF MANUFACTURIG THE SAME

摘要

Disclosed are an ultrasonic transducer and a manufacturing method for the same. the disclosed ultrasonic transducer includes a plurality of protrusion units installed on a conductive substrate to be separated from each other; a via hole penetrating the conductive substrate or one among the protrusion units; a first electrode including metal and filling the via hole; a second electrode installed on the lower surface of the conductive substrate; a membrane forming a plurality of cavities between the conductive substrate by being installed on the protrusion units; and an upper electrode installed on the membrane to come into contact with the first electrode.