| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe device which can appropriately set pressing force.SOLUTION: A probe device includes: a device holding section 450; a device side unit 314 having a flexible sheet and a plurality of device side terminals connected to a tested device 101; an intermediate unit 310 having an intermediate substrate provided closer to a tester side than the device side unit 314, a plurality of device side intermediate electrodes connected to the plurality of device side terminals and a plurality of tester side intermediate electrodes connected to the tester; a tester side unit 304 having a tester side substrate provided closer to the tester side than the intermediate unit 310 and a plurality of tester side electrodes electrically connected to the tester; a first decompression section 318 for decompressing a first space 344 between the intermediate unit 310 and the tester side unit 304; and a second decompression section 456 for decompressing a second space 370 between the device holding section 450 and the intermediate unit 310 in the state in which the tested device 101 is connected to the device side unit 314. |
