POLISHING APPARATUS AND POLISHING METHOD FOR POLISHING PERIPHERAL EDGE PART OF WORKPIECE, E.G. PLATE GLASS WITH POLISHING TAPE

摘要

PROBLEM TO BE SOLVED: To provide a polishing apparatus and a polishing method for polishing a peripheral edge part of a workpiece, e.g. a plate glass, with high precision.SOLUTION: A polishing apparatus includes a first polishing portion having a first horizontal polishing axis line for polishing a linear to-be-polished part of a peripheral edge part of a workpiece and a second polishing portion having a second horizontal polishing axis line for polishing a nonlinear to-be-polished part of the peripheral edge part of the workpiece. The first and second polishing portions each include a workpiece unit holding the workpiece and a polishing tape unit arranging at least a part of the surface of a polishing tape so as to face the work unit with the polishing axis line between the work unit and the polishing tape unit. The arranged surfaces of the polishing tape each constitute a polishing surface. In polishing, the linear to-be-polished part and a first polishing surface come in mutual contact and move relatively on the first polishing axis line, and the nonlinear to-be-polished part and a second polishing surface come into mutual contact and move relatively on the second polishing line.