| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspection device and a defect inspection method capable of accurately detecting a defect in the vicinity of an edge part without providing a mask area in the edge part.SOLUTION: A filter processing unit 9 (filter means) for emphasizing the variation in density of an inspection object by filter processing with an m-row and n-column image filter (m and n are natural numbers equal to or lager than 2) includes: a first filter area summing part 94 which calculates a first addition signal by adding m×n pieces of inspection image data comprising n pieces of image data in a direction orthogonal to a movement direction of the inspection object and m pieces of inspection image data in the movement direction of the inspection object, out of inspection image data; a second filter area summing part 95 which calculates a second addition signal by adding m×n pieces of inspection image data in positions which are spaced from the pieces of inspection image data for the first addition signal in the movement direction of the inspection object by a prescribed number of rows; and a difference calculation part 96 which generates inspection image data after the filter processing on the basis of the difference between the first addition signal and the second addition signal. |
