发明名称 |
MERGED LEGS AND SEMI-FLEXIBLE ANCHORING FOR MEMS DEVICE |
摘要 |
The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the cantilever. The legs ensure that each cantilever can move/release from above the RF electrode at the same voltage. The anchor region coupling matches the mechanical stiffness in all sections of the cantilever so that all of the cantilevers move together. |
申请公布号 |
KR20140069031(A) |
申请公布日期 |
2014.06.09 |
申请号 |
KR20147007885 |
申请日期 |
2012.09.04 |
申请人 |
CAVENDISH KINETICS, INC. |
发明人 |
VAN KAMPEN ROBERTUS PETRUS;UNAMUNO ANARTZ;KNIPE RICHARD L.;GADDI ROBERTO;MAHAMEED RASHED |
分类号 |
H01L27/14;B81B7/02 |
主分类号 |
H01L27/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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