PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC SENSOR, HARD DISK DRIVE, AND INK-JET PRINTER SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric element which is arranged by use of a potassium sodium niobate thin film, reduced in leak current, increased in reliability, and enhanced in the resistance to voltage.SOLUTION: A piezoelectric element comprises: a first electrode layer 8; a second electrode layer 14; and piezoelectric material layers 10 and 12 sandwiched between the first and second electrode layers. The piezoelectric material layers include at least one first piezoelectric material layer 10 composed of a potassium sodium niobate thin film substantially containing no manganese, and at least one second piezoelectric material layer 12 composed of a potassium sodium niobate thin film containing manganese.