METHOD OF FABRICATING ZINC OXIDE BASED THIN FILM FOR TRANSPARENT ELECTRODE

摘要

The present invention relates to a method for fabricating a zinc oxide-based thin film for a transparent electrode and, more particularly, to a method for fabricating a zinc oxide-based thin film for a transparent electrode by depositing a zinc oxide-based thin film on a substrate, which improves surface flatness of a zinc oxide-based thin film at the time of vapor depositing a zinc oxide-based thin film The present invention is characterized in that a zinc source gas and an oxidation agent gas are injected wherein two types of oxidation gases are used as the oxidation agent so as to control the surface shape of the oxidized zinc film to be vapor deposited.