| 摘要 |
The present invention relates to an anti-oxidation exhaust duct structure dedicated for toxic gas, capable of easily welding a plurality of ducts at a non-oxygen atmosphere in order to exhaust toxic gas, which is caused in manufacturing the semiconductor, to atmosphere contamination preventing facilities so that oxidation can be easily prevented. According to the embodiment, an exhaust duct dedicated for the toxic gas in order to exhaust toxic gas, which is generated in a semiconductor deposition process, to the atmosphere contamination preventing facilities includes a flange unit slidably fitted around an outer circumference of the duct having a predetermined length and coupled to the outer circumference; a duct connecting unit having one side with the same diameter and thickness as those of the duct, an end portion of the one side being welded with the duct, and the other side formed integrally with a locking part locked with the flange to prevent the flange from being out of the position thereof; a sealing part interposed between locking parts facing each other; and a stopping unit provided at an end of the duct connecting unit, which makes contact with the duct, and having a size enough to stop the through hole of the duct. |
