发明名称 IMPROVED PHOTOIMAGING
摘要 PROBLEM TO BE SOLVED: To provide a method and apparatus for photoimaging.SOLUTION: Specifically, there is provided a method and apparatus for photoimaging a substrate covered with a wet curable photopolymer. The photoimaged substrate is used to form images, such as electrical circuits or other features used e.g. in a photochemical machining industry (PCMI) such as lines, squares. spirals, circles or other geometrical and nongeometrical figures.
申请公布号 JP2014106302(A) 申请公布日期 2014.06.09
申请号 JP20120257900 申请日期 2012.11.26
申请人 RAINBOW TECHNOLOGY SYSTEMS LTD 发明人 JONATHAN KENNETT;CUNNINGHAM JOHN
分类号 G03F7/20;G03F7/09;G03F7/11;G03F7/38;H01L21/027 主分类号 G03F7/20
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