| 摘要 |
PROBLEM TO BE SOLVED: To provide a metallic cylindrical filter body that is most suitable for a large volume of treated fluid, and is enhanced in handling particularly for high purity and corrosive gas fluid.SOLUTION: A metallic cylindrical filter body for high purity gas is characterized in that a filter body of a cylindrical wound body is integrally made by the coaxial multilayer winding of metallic porous sheets and pressure sintering. The filter body includes a filtration part having a predetermined air hole property adjusted by the porous sheets, and a consolidation structure part continuously densified from the filtration part on at least one end. The consolidation structure part is configured such that a wound end part X of the porous sheet is tensed in the longitudinal direction of the cylindrical wound body, and the curl peeling of the porous sheet at the wound end part X is prevented, by the high densification by pressing the outer surface side of the cylindrical wound body toward the axial direction and to 5-30% thickness of the filtration part thickness. |
