TRANSMISSION OPTICAL SYSTEM, ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To stably guide luminous flux having a substantially uniform intensity distribution to a spatial optical modulator even if the output distribution of a light source changes.SOLUTION: There is provided a transmission optical system which is arranged in an optical path of an illumination optical system, as the illumination optical system which lights up an irradiated plane with light from a light source, which has an operation plane for imparting an angle distribution to incident light so as to form a pupil intensity distribution at an illumination pupil of the illumination optical system, and guides the light from the light source to the operation plane. The transmission optical system includes a fly-eye optical system comprising a plurality of refracting optical elements which are arranged in parallel and a condenser optical system which superposes a plurality of luminous flux wavefront-split by the fly-eye optical system one over another on the operation plane. Luminous flux passed through a first refracting optical element among the plurality of refracting optical elements forms a first illumination field on the operation plane through the condenser optical system and luminous flux passed through a second refracting optical element different from the first refracting optical element forms a second illumination field on the operation plane in a region shifting in position from the first illumination field through the condenser optical system.