发明名称 ACCELERATION SENSOR
摘要 PROBLEM TO BE SOLVED: To provide an acceleration sensor which can achieve the improvement of accuracy of detecting acceleration by reducing a difference of fluctuation of capacitance, which is generated during the rotation of a weight part due to a difference of gaps between fixed electrodes and movable electrodes.SOLUTION: In a first sensor 21, connections 28B, 29B provided to each of pairs of first and second fixed electrodes 28, 29, which are surrounded by a movable electrode 30, are placed on end sides in a manner to alternately differ with respect to each of the fixed electrodes 28, 29 arrayed in a Y direction.
申请公布号 JP2014106082(A) 申请公布日期 2014.06.09
申请号 JP20120258585 申请日期 2012.11.27
申请人 YAMAHA CORP 发明人 TSUJI NOBUAKI
分类号 G01P15/125;B81B3/00;G01P15/18;H01L29/84 主分类号 G01P15/125
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