X-RAY STRESS MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an X-ray stress measurement device capable of accurately measuring stress in a circumferential direction and an axial direction of a sample by a side inclination method.SOLUTION: An X-ray stress measurement device 1 for measuring stress of a sample S by a side inclination method comprises: an X-ray generator 2 for making X rays enter the sample S; a diffraction X-ray detector 3 for detecting diffraction X-rays diffracted at a stress measurement point P; an inclination angle change mechanism 5 for performing circular arc movement of the X-ray generator 2 and the diffraction X-ray detector 3 to change an inclination angle ψ of a diffraction plane normal N to a sample surface normal Z; and a measurement direction switching mechanism 6 for rotating the X-ray generator 2, the diffraction X-ray detector 3 and the inclination angle change mechanism 5 to a phase of 90° in a horizontal direction to switch a stress measurement direction.