| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an acceleration sensor of a capacitance type, the acceleration sensor being able to more reliably prevent collision between a fixed electrode and a movable electrode by appropriately arranging a restriction part that restricts movement of a weight part.SOLUTION: End points T1 to T4 set with respect to a first sensor 21 are set at such positions that a rectangular frame connecting the end points T1 to T4 surrounds the entire first and second fixed electrodes 28 and 29 and each side extends along an X or Y direction. Additionally, nine areas R1 to R9 sectioned by first straight lines 85A and 85B and second straight lines 86A and 86B passing through two of the end points T1 to T4 are set. First and second stoppers 23A and 23B are provided for each of the four areas R1, R3, R7, and R9 other than the area R5 provided with the fixed electrodes 28 and 29 and the areas R2, R4, R6, and R8 adjacent to the area R5.</p> |
