摘要 |
PROBLEM TO BE SOLVED: To remove an insulating film covering a terminal electrode layer on the substrate of an OLED display panel partially, through a simple process which does not cause any damage on a terminal electrode.SOLUTION: In a connector region 1a on the surface of an OLED layer formation substrate 1, a plurality of terminal electrodes 4a are formed, and a circuit pattern 50 having a pair of interdigital electrodes 51, 52, arranged while spaced apart from each other, is formed on the outside of the connector region 1a. On the surface of the OLED layer formation substrate 1, a peeling layer 6 composed of an organic material is formed so as to cover the connector region 1a of each terminal electrode 4a, and a piezoelectric thin film 2 and an insulating film 3 are laminated, in order, to cover the entire surface of each peeling layer 6 and circuit pattern 50. Thereafter, an AC voltage is applied to the material of a piezoelectric thin film 2 filling the gap between both interdigital electrodes, by generating an AC voltage in the circuit pattern 50, thus generating surface acoustic waves. |