FAULT DETERMINATION SUPPORT DEVICE AND METHOD, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To find out a fault symptom of a manufacturing facility from a process parameter.SOLUTION: A process data extraction unit 103 extracts a process data set of a time section from a process parameter stored in a process data storage unit 102. A process data delegate value calculation unit 104 calculates a process data delegate value which shows a feature of the process data set extracted by the process data extraction unit 103. A process fault correspondence data generation unit 105 generates a process data delegate value calculated by the process data delegate value calculation unit 104 and fault data which shows a fault and a deterioration state of a manufacturing facility stored in a fault information storage unit 101, in association with respective corresponding time sections as process fault correspondence data.