| 摘要 |
A radiation-sensitive resin composition includes a compound represented by a formula (1), and a base polymer. In the formula (1), R1 is a group represented by a formula (a1), and M+ represents a radiation-degradable monovalent cation. In the formula (a1), R2 represents a substituted or unsubstituted chain hydrocarbon group having 1 to 30 carbon atoms, or the like. R3 represents a substituted or unsubstituted divalent hydrocarbon group having 1 to 30 carbon atoms, or the like. R41 represents —CO—, or the like. R42 represents —CO—, or the like. m is an integer of 0 to 2. n is an integer of 0 to 1. A site denoted by * is a binding site with —O— in the formula (1).; |
| 主权项 |
1. A radiation-sensitive resin composition comprising:
a compound represented by a formula (1); and a base polymer wherein, in the formula (1), R1 is a group represented by a formula (a1); and M+ represents a radiation-degradable monovalent cation,
R2R41—R3mR42n* (a1) wherein, in the formula (a1), R2 represents a chain hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 30 carbon atoms or a heterocyclic group having 3 to 30 ring atoms; R3 represents a divalent hydrocarbon group having 1 to 30 carbon atoms, wherein a part or all of hydrogen atoms included in the chain hydrocarbon group, the alicyclic hydrocarbon group and the heterocyclic group represented by R2, and a part or all of hydrogen atoms included in the hydrocarbon group represented by R3 are not substituted or substituted; R41 represents —CO—, —COO—, —OCO—, —O—CO—O—, —NHCO—, —CONH—, —NH—CO—O—, —O—CO—NH—, —NH—, —S—, —SO—, —SO2— or —SO2—O—; R42 represents —CO—, —COO—, —OCO—, —NHCO—, —CONH—, —NH—CO—O—, —SO— or —SO2—; m is an integer of 0 to 2; and n is an integer of 0 to 1, wherein in a case where R3, R41 and R42 are each present in a plurality of number, a plurality of R3s, R41s or R42s are each independently as defined, and wherein a site denoted by * is a binding site with —O— in the formula (1).
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